Тестовое и измерительное оборудование Lasers

IX-6600

IX-6600 IX-6600

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JPSA IX-6600

Laser lift-off, 2" and 4" System includes: Enclosed Class I Laser Micromachining System Integrated AC Disconnect Box All Granite System Includes: Beam Delivery and Motion stage 100% granite gantry structure Custom Weldment Frame, includes casters and machine feet External Laser mounting and integration High accuracy JPSA crossed-roller micrometer-adjust Microtech camera stage alignment assembly, optics vertical adjustment of ± 40mm (coarse) / 20mm (fine) range Variable attenuator, motorized, single plate type (1 wavelength, 248nm) 248nm optics kit Inspection system includes OXC "on-target" real-time corrected CCD viewing system, 0.7X to 5.5X zoom range Second high resolution inspection camera Video illumination: LED dimmer controlled light units to visualize the wafer for alignment purpose. The spectrum and incident angle of the illumination will be set so that the p-metal pads on the epi-side of the Optogan LED wafers are visible through the sapphire of the wafer for backside polished. Cross Hair Generator Camera display on PC monitor JPSA Controls 32 System Control Software Includes: Engineer level user interface that provides complete control of all system devices and software components for system setup and programming System configuration editor, for convenient editing of system software settings Most system functions may be customized by the user through the use of ‘Macro’ scripts, see below JPSA System Controls 32 Module, provides: Advanced project management utilities that permit system software to ‘remember’ settings for an unlimited number of different production tasks. This feature permits the system to be configured for many different tasks. A project manager window allows the user quickly change the system from job to another JPSA Tools 32 Module, provides: User access control for three levels: Operator, Maintenance, and Setup User list editor JPSA data entry controls used by all JPSA software, consistent user interface across all JPSA software modules JPSA Motion Controls 32 Module, provides: Setup and control of all motion stages including: linear stages, rotary stages, and laser fire axis Control of complex multi-axis vector motion, including X-Y stage motion with coordinated laser firing JPSA Laser Controls 32 Module with JPSA Excimer Laser Driver, provides: Communication with and control of Excimer laser User interface window for accessing all operation and maintenance functions of the laser JPSA Macro Controls 32 Module, provides: High level programming language that permits users to program complex automation sequences that integrate motion control, digital I/O, and laser functions and then save them in files User friendly Macro Editor, features, Point and click programming – no need to memorize command codes Drag and drop editing within and between editor windows Macro Editor may be used to create scripts to customize nearly all JPSA system functions The PC will be equipped with a motion control card and a networking card. The PC will be configured with a German format key board. The machine will be supplied with process control software as described above. The system software will control all aspects of machine functionality and control of the process operation including communication with, set up and control of Excimer laser, motion stage and laser fire axis. The software will provide maintenance reminders for optics exchange maintenance tasks. The software will include a process editing environment where processes can be viewed, edited and saved. The logging facility will create a log file, the format of the log file will be such that the file can be taken from the control PC and then viewed on another PC. Each log entry will include batch or wafer numbers by either keyboard entry or bar code scanner. The log files may be read in MS Excel format. Software will provide an on-screen notification of when laser power falls below a user selectable level. The control software will operate as designed and intended, all features included will function. Non-functioning features will be removed. The software will operate without any hang ups, stalling or other occurrences requiring a reboot of the PC relating to issues unassociated with running Windows OS. It will be possible to upgrade the software on field for automatic alignment of the wafer and automatic focus Second Generation Six-Axis Motion Control System Motion Control Electronics, includes: PC based motion control card, 6 axes of servo or step motor JPSA motion amplifier module, includes: Servo amplifiers Micro-stepping stepping amplifiers X-Y Part Position Stage Air Bearing High Accuracy System Features High precision JPSA design Linear scale encoders Brushless linear motor servo drive system X-Y Stage Specifications: Travel: up to 4” diameter wafers Resolution: 0.1mm Accuracy: +/- 3mm accuracy over 150mm of travel Repeatability: Z -Theta Wafer Alignment Stage: Motorized Z-Theta system Z-Axis Specifications: Travel: 9.0 mm Resolution: 0.25mm Accuracy: 2.5 mm Repeatability: 4.0 mm (bi-directional) Theta Axis Specifications: Travel: +/- 175 Degrees Resolution: 0.001 Degrees Accuracy: 0.02 Degrees Repeatability: 0.002 Degrees Wafer Chuck Vacuum Chuck for 2” and 4” wafers. Alternate chuck designs available on request 3-point micro-adjustable leveling system with locking screws Motorized Variable Attenuator Stage Step motor drive system Specifications: Travel: 90 degrees Resolution: 0.01 Degrees Laser Fire Axis Generates TTL pulses to control laser firing while laser is in external trigger mode: Permits precise control of laser firing, including: Bursts of laser pulses with accuracy to a single pulse Laser firing coordinated with part motion with Fire on the Fly for LFOV Processing Beam Delivery System Includes: All Granite Beam Delivery Support Structure Vibration isolating mounting platform for wafer stages and beam delivery optics Stiffness and large thermal mass of granite structure prevent changes in beam delivery system alignment over time. Laser Beam Stop Computer Controlled Laser Beam Stop JPSA Proprietary Optical System, includes: LFOV Optics Package JPSA Precision Grade UV Optics and Optic Mounts for stability and ease of adjustment. Manual RVA Aperture Mask (Motorized RVA Optional) Fly-eye Homogenizer Additional Equipment Included with IX-6600 for LFOV Applications Beam Diagnostics Power Meter- USB interface to PC with laser beam power mount on X,Y Stage Dual Beam Profilometer System CCD camera beam profilometer Video beam profile capture card and software Special on target profilometer crystal for process camera target profile viewing Mask Plane Viewing Profilometer with Pop in Beam Switcher 2010 vintage.

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